182 graphite boat size

The size of the graphite boat is 143mm 143mm20mm.

The hollow size in the middle of the conventional graphite boat is 143mm* 143mm, which has a large contact area with the silicon wafer, and it is easy to form boat marks around the silicon wafer. If the contact area is large, it will scratch the silicon wafer and affect the product qualification rate. Meanwhile, the angle between the upper edge of the conventional graphite boat and the upper edge of the battery chip is 3.