Standard for polishing cleanliness of ultra-pure water pipeline

? TMB117-15a standard ISO11400 standard,

1, American ASTM standard: astmb117-15a standard specifies the requirements and test methods of ultra-pure water polishing tubes for semiconductor industry. Among them, the polishing degree of the inner wall of the pipeline should be below 0.2 micron, the particle concentration should be less than 10 6 /mL, and the number of microorganisms should be less than 1CFU/mL.

2. European ISO standard: ISO1140 specifies the requirements and test methods of ultra-pure water polishing tubes for semiconductor industry. Among them, the polishing degree of the inner wall of the pipeline should be below 0.4 micron, the particle concentration should be less than 10 4 /mL, and the number of microorganisms should be less than 1CFU/mL.